Miniature Transportation Sample Vacuum Chamber for Micro-manipulated Probe Stations

WOBURN, Mass. - Oct. 22, 2013 - PRLog -- Janis Research Company is pleased to announce that it is offering a patent pending, miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment.

The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with special environment into a vacuum or cryogenic micro-manipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.

Unlike a common vacuum load lock the vacuum chamber has the following features.

-          typical sizes of 50 mm diameter and 25 mm thickness

-          no gate valves required

-          very convenient and easy operation

-          low cost

-          mounting of the transportable sample mount without increasing base temperature of the cryogenic probe station